Sputtering Targets

FURUYA METAL provides wide variety of sputtering targets for various applications. 
FURUYA develops materials which is attuned to customer’s needs, making our technologies of precious metals having been accumulated for many years. 
Custom made thin film service is available upon request.
We can propose alloys and other materials with new features.

Products

  • Ru
  • APC
  • Ir
  • Pt
  • Pd

Applications

Magnetic Recording Media

Thin film of various kind of precious metals, such as Ruthenium and Platinum-alloy, is used for Magnetic Recording Media and Magnetic Head which constitutes HDD (Hard Disc Drive) and especially Ruthenium targets and thin films play very important roles in current Perpendicular Magnetic Recording system. The next generation recording system such as Shingled Magnetic Recording and Thermally Assisted Recording is said to also require Ruthenium or Platinum-alloy layers. FURUYA METAL provides various kind of targets which include items mentioned above.

Our Products

FURUYA METAL refines raw materials and fabricates products utilizing our accumulated technologies and knowledge for many years. Minimizing impurities make it possible to reduce the risk of HDD quality issues and to make smooth thin films. Furthermore, our own sintering system could meet various kind of quality demands.

Perpendicular Magnetic Recording Perpendicular Magnetic Recording system achieves mass storage using Pt-alloys and Ru.

■Related Products

  • Ruthenium (Ru)
  • Platinum (Pt)
  • Ruthenium-alloy

FPD (Flat Panel Display)

Organic EL is attracting considerable attention as a high-resolution display for smartphones and tablet PCs, which have become popular as cutting-edge information devices. Organic EL is aided by superior low resistivity, high reflectivity, high corrosion resistance, and micro-fabrication characteristics of the APC.

Touch Panels Organic Light-emitting Diode (OLED)

■Related Products

  • APC (Ag-Alloy)
  • APC-TR (AG-Alloy/Heat Resistant Alloy)

See here for detailed information about APC

  • *Furuya also provides compatibility with large targets.

Semiconductors

Sputtering Targets is essential to semiconductor industry. It is used for Interconnects and electrodes. As smart phones and tablet PCs are here to stay, it is needed to accelerate the speed of data processing and to increase the size of data storages. Materials itself are also required to have high quality.
FURUYA METAL works aggressively development of materials for next generation Semiconductor such as Non-volatile memory (STTRAM / ReRAM / PRAM) and MEMS.

Our Products

FURUYA METAL manufactures high purity and high density Targets, utilizing our technology of refining PGMs.
We propose products which have less particles and have more superior uniformity performance, by controlling and customizing size of particles and orientation.
Having sputtering instruments inside our facility enables us to inspect characteristics of thin films. Dual-sputtering and triple-sputtering instruments make it possible to develop various alloy thin films.

Targets for Semiconductor Industry -MRAM-

MRAM is drawing an attention as memory of next generation. Layers contains several metal layers. PGM materials are used between two magnetic layers, or between magnetic layer and another layer.

Upper Electrode Upper Electrode Magnetic Layer Bottom Electrode Low Resistance (Spin direction of electrons are the same) High Resistance (Spin direction of electrons are the reverse)

■Targets for MRAM

  • Ruthenium (Ru)
  • Platinum (Pt)
  • Palladium (Pd)

Targets for Semiconductors -Micro Electro Mechanical Systems-

Microelectronics devices (MEMS) vibrates when Single Crystal Film is put between electrodes at the effect of balk waves. Widespread use of Smartphone and Tablet PCs accelerate the need of high speed data processing. High quality materials such as PGMs are being popular as materials for these devices.

Targets for Semiconductors -Micro Electro Mechanical Systems-

■Related Products to MEMS

  • Ruthenium (Ru)
  • Platinum (Pt)
  • Iridium (Ir)

Electronic Components

Our products are essential for crystal units, electrodes of LED and reflective layer of Optical Disk. Crystal Units are used in mobile phones, Cars, DVDs and TVs. Other applications include LED and optical components.

■Targets Relate to Electronic Component