Powder Sputtering Machine
Powder Sputtering is a technology which coats metals, ceramics, and various other materials at a nano level using a fine powder in a dry environment.
Optimal materials search
This technology is utilized for materials searches in various industries including batteries, catalysts, powder metallurgy, paints, electronic components, and cosmetics.
Co-sputtering film formation
We can do co-sputtering of binary and ternary targets.
Ir, Ru, Pt, Au, Ag, APC, Pd, Rh
Al, Si, Ti, Cr, Mn, Fe, Ni, Cu, Zn, Zr, Nb, Mo, In, W
Various Li oxides, Al2O3, SiO2, TiN, ZrO2 (YSZ), Ta2O5, Nb2O5