Thermocouple Products Thermocouples for Semiconductor Manufacturing

In semiconductor manufacturing, thermocouples are indispensable components in processes that require precise temperature control, such as diffusion furnaces and CVD systems, where they directly influence product quality and yield. Furuya Metal manufactures thermocouples and quartz components used in these critical processes. By providing an integrated solution encompassing thermocouple wire manufacturing, assembly, and temperature calibration, we are able to meet our customers’ demanding requirements.

In addition, we manufacture wafer thermocouples, in which thermocouples are integrated with wafers, as well as R-SP, our proprietary reinforced Type R thermocouple developed to enhance creep strength.

SiC protection tube thermocouple

Consists primarily of a silicon carbide (SiC) protection tube and is used in diffusion furnaces and CVD systems.

L-shaped quartz protection tube thermocouple

Consists primarily of an L-shaped quartz protection tube and is used in diffusion furnaces and CVD systems.

Spike thermocouple

Used for heater temperature control in diffusion furnaces and CVD systems.

Wafer thermocouple

A wafer thermocouple is a temperature sensor used to measure temperature distribution across the surface of wafers made of materials such as silicon and glass.

Quartz components

Quartz components are used in thermocouple protection tubes and semiconductor manufacturing equipment. To prevent contamination by impurities, all processing is carried out in cleanrooms, ensuring high product quality.

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