Thin Film Products Semiconductor Sputtering Targets

In the semiconductor industry, precious metal sputtering targets are essential materials for interconnect formation and functional thin film applications.

As device scaling continues to advance, efforts are underway to improve the precision and durability of EUV (Extreme Ultraviolet) lithography masks and to develop barrier-free interconnect technologies. Precious metals, particularly ruthenium, are attracting increasing attention as key materials that support these innovations.

In addition, precious metals play an important role in next-generation semiconductor memory technologies, including SOT-MRAM and ReRAM, where they contribute to stable electrical performance and high reliability.

To meet the stringent quality requirements of semiconductor applications, Furuya Metal develops and manufactures high-purity ruthenium and iridium targets, as well as a wide range of precious metal alloy targets.