Thin Film Products MEMS Sputtering Targets
In the field of MEMS (Micro-Electro-Mechanical Systems), precious metal materials also play an important role. Owing to their excellent electrical conductivity, corrosion resistance, and reliability, precious metals are widely used as electrodes, interconnects, and functional sensor layers in IoT, automotive, and medical applications, where high-precision operation and long-term stability are essential.
In addition to precious metal targets for electrode applications, Furuya Metal develops and manufactures AlSc (aluminum–scandium) alloy targets for forming high-performance piezoelectric thin films.
Materials by application
| RF MEMS | AlSc、Ru、Mo |
|---|---|
| pMUT | AlSc、Pt、Ir、Ir Alloy、Ru |
MEMS Principle
Some MEMS devices incorporate a piezoelectric thin film sandwiched between electrodes. When a high-frequency electrical signal is applied, bulk acoustic waves are generated within the piezoelectric layer, causing the device to resonate at specific frequencies.
With the widespread adoption of smartphones and tablet devices, demand for high-speed communication technologies has increased significantly. Precious metal materials are widely used as electrode materials in these advanced communication devices.
AlSc sputtering targets for next-generation piezoelectric thin films
Piezoelectricity is the phenomenon by which electrical energy is generated when mechanical force is applied, and conversely, mechanical motion is produced when an electric field is applied. This property is widely utilized in sensors, RF filters, and other electronic devices.
As advances in AI continue to drive demand for higher-performance electronics, piezoelectric devices have become an essential technology supporting next-generation communications.
While AlN thin films have traditionally been the material of choice, ScAlN films formed using AlSc sputtering targets offer significantly enhanced piezoelectric performance through the addition of scandium, enabling high-frequency and wide-bandwidth characteristics.
Leveraging its proprietary manufacturing processes, Furuya Metal produces large-diameter, high-density AlSc targets with precise composition control. We have a proven track record of manufacturing targets up to 400 mm in diameter with alloy compositions ranging from 0.5 at% to 60 at% scandium.
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